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“ Synchrotron radiation has become, in the course of the last three decades, a powerful tool for analytical purposes and for advanced fabrication, indispensable for a great many of disciplines such as the life sciences, materials science, environmental analysis, and micro/nano fabrication. ”
-- Prof Herbert Moser, Department of Physics and Director of Singapore Synchrotron Light Source, NUS. |
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SSLS: Bringing micro/nanofabrication to industry
The use of synchrotron radiation deep lithography or deep X-ray lithography has become a powerful tool for advanced fabrication in the last three decades. Most notably, it has been applied to micro/nanofabrication. Deep X-ray lithography has the advantage of producing large areas filled with fine patterns in combination with tall structures as compared to optical or deep ultraviolet (DUV) lithography which is the current commercial method for micro/nanofabrication, in particular, in the field of semiconductor manufacturing. Currently, micro/nanofabrication using deep X-ray lithography is aimed at fields such as micromechanics, biotechnology, X-ray optics and micro-optics.
Owing to the strong concentration of high-tech industry combined with the high level of scientific research and education, Singapore is conducive for the development of synchrotron radiation applications. The Singapore Synchrotron Light Source (SSLS), headed by Professor Herbert Moser of the Department of Physics, offers a user facility providing synchrotron radiation services. SSLS expertise in the production of high-aspect-ratio (structures that are much taller than wide) plastic moulds through the method of synchrotron radiation deep lithography has not gone unnoticed. In fact, SSLS is the only centre in Asia to have been contracted by Micromotion GmbH, a German high-tech company, to be one of its privileged plastic moulds suppliers.
In explaining the choice of Singapore, Dr Udo Kirsch, Head of Microstructuring at Micromotion, said that SSLS was selected because it can produce the high-aspect-ratio plastic micro moulds in both high quality and large quantity.
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INSPECTING MICRO/NANO MANUFACTURING FACILITY: Dr Udo Kirsch (left) and Prof Herbert Moser (right)
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Micromotion, located at Mainz-Gonsenheim near Frankfurt in Germany, is specialised in the development and manufacture of microgears and microactuators using the Micro Harmonic Drive principle. The Micro Harmonic Drive is suited for precision positioning applications in a wide range of compact machines and portable devices. The products offer a new generation of miniaturised products in a wide range of application areas such as semiconductor manufacturing, medical equipment, automation, optical communication and laser technology.
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FROM MOULD TO MICRO GEAR: Mask for deep X-ray lithography consisting of gold absorber structures on a graphite wafer held by an aluminium ring (left), SU-8 mould 550
µm tall for subsequent metal filling by electroplating. Scale bar 500
µm (centre); and Rotary Bond Tool for Die Attach Systems in semiconductor packaging fitted with the Micro Harmonic Drive (right).
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Besides synchrotron radiation deep lithography, technology developed by SSLS has applications in many other fields -- including the assessment of structure, geometry and chemistry of materials. For instance, SSLS was commissioned by an art connoisseur to evaluate a Thai Buddha statue. Using X-ray fluorescence spectroscopy, it was shown that the top was made of brass while the body was made of bronze. Traditional methods of analysing the statue would have damaged the artefact.
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GEAR WHEEL MOULD IMAGE DISCUSSION: Dr Linke Jian, Head of micro/nano-manufacturing facility LiMiNT (left) and Mr Shahrain bin Mahmood (right) |
Another area of expertise of SSLS includes the Infrared Spectro/Microscopy beamline (ISMI) which involves the study of molecules, low energy electron excitations in solids and electromagnetic metamaterials. Commissioned by the Prime Ministers Office in collaboration with the Singapore Police Force, SSLS used ISMI to determine the nature of explosives after an explosion had occurred. The ISMI offers a non-destructive means of analysing explosives residues to establish, within two hours, the type of explosives used.
SSLS has also collaborated with industry partners like Chartered Semiconductor, Sony Singapore as well as ST Microelectronics.
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